diff --git a/rtl/mips64/makefile.cpu b/rtl/mips64/makefile.cpu
new file mode 100644
index 0000000000..c472ed7712
--- /dev/null
+++ b/rtl/mips64/makefile.cpu
@@ -0,0 +1,6 @@
+#
+# Here we set processor dependent include file names.
+#
+
+CPUNAMES=mips64 math set cpuh
+CPUINCNAMES=$(addsuffix .inc,$(CPUNAMES))
diff --git a/rtl/mips64/set.inc b/rtl/mips64/set.inc
new file mode 100644
index 0000000000..3c95bae582
--- /dev/null
+++ b/rtl/mips64/set.inc
@@ -0,0 +1,13 @@
+{
+   This file is part of the Free Pascal run time library.
+   Copyright (c) 2022 by Florian Klaempfl
+   members of the Free Pascal development team.
+
+   See the file COPYING.FPC, included in this distribution,
+   for details about the copyright.
+
+   This program is distributed in the hope that it will be useful,
+   but WITHOUT ANY WARRANTY;without even the implied warranty of
+   MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE.
+
+**********************************************************************}
diff --git a/rtl/mips64el/cpuh.inc b/rtl/mips64el/cpuh.inc
index 0cbce4a57a..ce841e54c6 100644
--- a/rtl/mips64el/cpuh.inc
+++ b/rtl/mips64el/cpuh.inc
@@ -12,4 +12,4 @@
 
 **********************************************************************}
 
-{$I ../mips64/math.inc}
+{$I ../mips64/cpuh.inc}
diff --git a/rtl/mips64el/set.inc b/rtl/mips64el/set.inc
index ce841e54c6..d01bfe9e35 100644
--- a/rtl/mips64el/set.inc
+++ b/rtl/mips64el/set.inc
@@ -12,4 +12,4 @@
 
 **********************************************************************}
 
-{$I ../mips64/cpuh.inc}
+{$I ../mips64/set.inc}
diff --git a/rtl/mips64el/setjumph.inc b/rtl/mips64el/setjumph.inc
index 17f4ddf3c1..5390d2ee74 100644
--- a/rtl/mips64el/setjumph.inc
+++ b/rtl/mips64el/setjumph.inc
@@ -1 +1 @@
-{$i ../mips64/setjumph.inc}
\ No newline at end of file
+{$i ../mips64/setjumph.inc}